This book brings together investigations which combine theoretical and experimental results related to such systems as flexure hinges and compliant mechanisms for precision applications, the non-linear analytical modeling of compliant mechanisms, mechanical systems using compliance as a bipedal robot and reconfigurable tensegrity systems and micro-electro-mechanical systems (MEMS) as energy efficient micro-robots, microscale force compensation, magnetoelectric micro-sensors, acoustical actuators and the wafer bonding as a key technology for the MEMS fabrication.  The book gathers the contributions presented at the 7th Conference on Microactuators, Microsensors and Micromechanisms (MAMM), held in Ho Chi Minh City, Vietnam, in November 2024. The aim of the conference was to provide a special opportunity for a know-how exchange and collaboration in various disciplines concerning systems pertaining to micro-technology.   The conference was organized under the patronage of International Federation for the Promotion of Mechanism and Machine Science (IFToMM).