In the education area, Professor Campbell leads the University of
Minnesota's participation in Nano-Link, an NSF sponsored regional
center for nanotechnology education at the AAS level. He has designed
and implemented a one-semester capstone experience Microelectronic
Fabrication and created the text book as a result. Designed for
advanced undergraduate or first-year graduate courses in semiconductor
or microelectronic fabrication, this fourth edition of Fabrication
Engineering at the Micro- and Nanoscale provides a thorough and
accessible introduction to all fields of micro and nano fabrication.
The text covers the entire basic unit processes used to fabricate
integrated circuits and other devices.
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Product details
ISBN
9780197547885
Published
2020
Edition
4. edition
Publisher
Oxford University Press Academic US
Language
Product language
Engelsk
Format
Product format
Digital bok
Author