Nanopositioning Technologies Fundamentals and Applications
Innbundet /
2016
/ Engelsk
Product details
ISBN
9783319238524
Published
2016-01-07
Publisher
Springer International Publishing AG
Height
235 mm
Width
155 mm
Age
Research, UP, P, 05, 06
Language
Product language
Engelsk
Format
Product format
Innbundet
Number of pages
6
This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning.
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This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies, and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.
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Enriches understanding of the latest fundamentals and applications of nanopositioning technologies Maximizes reader insights into design/modeling/control of nanopositioning systems, nanomanipulation under scanning electron microscopes and nanopositioning for semiconductor inspection Reviews comprehensively key recent research into nanopositioner design, sensors, actuators, controls and emerging applications
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Product details
ISBN
9783319238524
Published
2016-01-07
Publisher
Springer International Publishing AG
Height
235 mm
Width
155 mm
Age
Research, UP, P, 05, 06
Language
Product language
Engelsk
Format
Product format
Innbundet
Number of pages
6