This book covers key topics in the emerging field of plasmonic MEMS, with an emphasis on practical aspects. Although readers can find many comprehensive textbooks on electromagnetic waves, nanophotonics and plasmonics, most of these lack the focus needed for a thorough grasp of plasmonic micromachining and MEMS. This book introduces the main framework of plasmonic MEMS, providing an overview of introductory concepts, a thorough description of the basic foundations, along with the state-of-the-art and existing challenges. The author presents an abbreviated overview of the basic physics and devices related to electromagnetic waves and surface plasmons. Additional coverage includes recent advances in the fabrication of sub-100-nm patterns on micro scale devices and structures and a review of emerging techniques in the fabrication of plasmonic systems. A comprehensive and historical review of the current advances in the area of plasmonic nanofabrication is also included. This book focuses on an appealing and distinctive aspect of plasmonics, as a tool for patterning and the fabrication of ultra-fine resolution structures. The author reviews the recent developments in plasmonic MEMS and microsystems for biosensing applications, including refractive-index based label-free biosensing, plasmonic integrated lab-on-chip systems, plasmonic for near-field scanning optical microscopy (NSOM) and plasmonics on-chip system for cellular imaging.