PRACTICAL LAB MANUAL ON THE STEPWISE DESCRIPTION OF THE EXPERIMENTAL
PROCEDURES OF MICRO ELECTROMECHANICAL SYSTEMS (MEMS) DEVICES _Micro
Electromechanical Systems (MEMS)_ is a highly practical lab manual on
the relevant experimental procedures of MEMS devices, covering
technical aspects including simulations and modeling, practical steps
involved in fabrication, thorough characterizations of developed MEMS
sensors, and leveraging these sensors in real-time targeted
applications. The book provides in-depth coverage of multi-physics
modeling for various sensors, as well as fabrication methodologies for
photolithography, soft lithography, 3D printing, and laser
processing-based experimental details for the realization of MEMS
devices. It also covers characterization techniques from morphological
to compositional, and applications of MEMS devices in contemporary
fields such as microfluidics, wearables, and energy harvesters. The
text also includes a foundational introduction to the subject. The
book covers additional topics such as:
* Basic fluid flow and heat transfer in microfabrication, Y and T
channel mixing, and simulation processes for Droplet generation
* Simulations based on cyclic voltammetry and electrochemical
impedance spectroscopy, screen and ink-jet printing, laser-induced
graphene, reduced graphene oxide, and 3D printing
* X-ray diffraction, scanning electron microscopy, optical
microscopy, Raman spectroscopy, energy dispersive spectroscopy, and
Fourier Transform Infrared (FTIR) Spectroscopy
* Experimental stepwise details to enable students to perform the
experiments in the practical laboratory and future outlooks on the
direction of the field
A practical guidebook on the subject, _Micro Electromechanical
Systems (MEMS)_ is a must-have resource for students, academicians,
and lab technicians seeking to conduct experiments in real-time.
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Practical Lab Manual
Produktdetaljer
ISBN
9781394229840
Publisert
2025
Utgave
1. utgave
Utgiver
Vendor
Wiley-IEEE Press
Språk
Product language
Engelsk
Format
Product format
Digital bok
Forfatter